JPH0316646U - - Google Patents

Info

Publication number
JPH0316646U
JPH0316646U JP7783389U JP7783389U JPH0316646U JP H0316646 U JPH0316646 U JP H0316646U JP 7783389 U JP7783389 U JP 7783389U JP 7783389 U JP7783389 U JP 7783389U JP H0316646 U JPH0316646 U JP H0316646U
Authority
JP
Japan
Prior art keywords
frequency
induction coil
electromagnetic field
ion source
capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7783389U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7783389U priority Critical patent/JPH0316646U/ja
Publication of JPH0316646U publication Critical patent/JPH0316646U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Sources, Ion Sources (AREA)
JP7783389U 1989-06-30 1989-06-30 Pending JPH0316646U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7783389U JPH0316646U (en]) 1989-06-30 1989-06-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7783389U JPH0316646U (en]) 1989-06-30 1989-06-30

Publications (1)

Publication Number Publication Date
JPH0316646U true JPH0316646U (en]) 1991-02-19

Family

ID=31620576

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7783389U Pending JPH0316646U (en]) 1989-06-30 1989-06-30

Country Status (1)

Country Link
JP (1) JPH0316646U (en])

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